With this paper, The brand new lapping slurry and polishing slurry are released. As well as deliquescence diploma of CLBO is fallen to cheapest. A whole new Functioning engineering can also be adopted. After tough sharpening, the concentration of ultra-precision sprucing slurry is increased adequately. So does the ultra-precision sprucing speed, as well as wiping pace is faster when compared to the deliquescence pace. The CLBO crystal area roughness can accomplish 1nm and keep the surface area high-quality properly. Obtain via your institution
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The typical energy of your NIR laser continue to has the likely for being enhanced to tens of watts for example 70 W [26] In the event the double-pass configuration can be utilized for the Yb:YAG SCF amplifier phase. That's why, Should the conversion effectiveness of 31% from NIR to DUV may be nevertheless preserved at this greater energy affliction, the typical output electricity of the DUV laser at 258 nm could possibly be more than 20 W, which would become a amazing ability amount with the DUV laser and lead to the unanticipated DUV laser machining success. Furthermore, for prime-electric power DUV laser, the UV damage of the nonlinear crystal, such as the Home windows for CLBO crystal plus the mirrors, is an additional critical parameter for long term and secure Procedure.
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On the other side, the facility scaling on the NIR laser is another part to boost the ordinary website power with the 193-nm DUV laser. Because of the deficiency of the superior-electrical power amplification Option of the NIR laser (by way of example at 1553 nm), nonlinear frequency processes like optical parameter oscillation (OPO) may be placed on produce a wavelength converter by shifting the wavelength from one μm to the specified wavelength and obtaining relative greater electrical power [21]. Just lately, a diamond Raman laser showed its potential in obtaining a substantial electricity in addition to a superior conversion efficiency on the 1st Stokes in the 1-μm laser [22,23], which means the likelihood to get applied in the 193-nm DUV laser era as a result of its higher Raman attain and huge frequency change.
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Within the scientific and industrial applications, the beam excellent on the DUV laser is likewise a vital parameter. Particularly, the beam excellent in the DUV laser dramatically influences the laser machining results. The beam good quality of the DUV laser is set by that of the elemental laser and also the crystal for that frequency conversion. Recently, a large-electric power DUV laser (>ten W) at 258 nm was reported by using a beam quality of M2 < 1.5, which was generated by FHG of the Yb:YAG laser at 1030 nm using the CLBO crystal [thirteen]. This laser would lead to a much better laser machining final result when compared to the earlier DUV lasers with larger M2.
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The beam profile shown in Determine 7b shown a very good beam quality as one of the deserves of Raman laser, which might be valuable to create a 193-nm DUV laser with a high quality beam.
Its UV absorption edge reaches one hundred eighty nm. The effective nonlinear optical coefficient of CLBO for frequency doubling at 1064nm is about two times as big as that of KDP. CLBO crystals is often grown with the stoichiometric melt with decrease viscosity.
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